Analysis of multimask fabrication errors for diffractive optical elements

Applied Optics

Volumn 46, Issue 12, 2007, Pages 2180-2188

  Caley, Adam J ^a   Braun, Markus ^b   Waddie, Andrew J ^a   Taghizadeh, Mohammad R ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; FABRICATION; FIBER LASERS; PRODUCT DESIGN;

FABRICATION ERRORS; MISALIGNMENT;

DIFFRACTION GRATINGS;

EID: 34250777842     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.46.002180     Document Type: Article

References (15)

1. M. J. Thomson and M. R. Taghizadeh, "Diffractive elements for high-power fibre coupling applications," J. Mod. Opt. 50, 1691-1699 (2003).
2. K. Ballüder and M. R. Taghizadeh, "Regenerative ring-laser design by use of an intracavity diffractive mode-selecting element," Appl. Opt. 38, 5768-5774 (1999).
3. M. R. Taghizadeh and A. J. Waddie, "Micro-optical and optoelectronic components for optical interconnection applications," Acta Phys. Pol. A 101, 175-188 (2002).
4. M. W. Farn, M. B. Stern, W. B. Veldkamp, and S. S. Medeiros, "Color Separation by use of binary optics," Opt. Lett. 18, 1214-1216 (1993).
5. Y. Ha, H. Hua, and J. P. Rolland, "Design of an ultralight and compact projection lens," Appl. Opt. 42, 97-107 (2003).
6. A. W. Lohmann and D. P. Paris, "Binary Fraunhofer holograms, generated by computer," Appl. Opt. 6, 1739-1748 (1967).
7. J. S. Liu, A. J. Caley, and M. R. Taghizadeh, "Symmetrical iterative Fourier-transform algorithm using both phase and amplitude freedoms," Opt. Commun. 267, 347-355 (2006).
8. S. Kirkpatrick, C. D. Gelatt, and M. P. Vecchi, "Optimization by simulated annealing," Science 220, 671-679 (1983).
9. M. R. Taghizadeh, P. Blair, B. Layet, I. M. Barton, A. J. Waddie, and N. Ross, "Design and fabrication of diffractive optical elements," Microelectron. Eng. 34, 219-242 (1997).
10. J. Bengtsson and M. Johansson, "Fan-out diffractive optical elements designed for increased fabrication tolerence to linear relief depth errors," Appl. Opt. 41, 281-289 (2002).
11. V. Kettunen, K. Jefimovs, J. Simonen, O. Ripoll, M. Kuittinen, and H. P. Herzig, "Diffractive elements designed to suppress unwanted zeroth order due to surface depth error," J. Mod. Opt. 51, 2111-2123 (2004).
12. J. M. Miller, M. R. Taghizadeh, J. Turunen, and N. Ross, "Multilevel-grating array generators: fabrication error analysis and experiments," Appl. Opt. 32, 2519-2525 (1993).
13. U. D. Zeitner and P. Dannberg, "On-axis diffractive elements with improved signal quality in the presence of fabrication errors and wavelength tolerances," J. Mod. Opt. 62, 2051-2057 (2005).
14. A. J. Waddie and M. R. Taghizadeh, "Interference effects in far-field diffractive optical elements," Appl. Opt. 34, 5915-5919 (1999).
15. K. Ballüder and M. R. Taghizadeh, "Optimized quantization for diffractive phase elements by use of uneven phase levels," Opt. Lett. 26, 417-419 (2001).