A large-displacement CMOS-micromachined thermal actuator with capacitive position sensing

2005 IEEE Asian Solid-State Circuits Conference, ASSCC 2005

Volumn , Issue , 2005, Pages 89-92

  Zheng, Li Sheng ^a   Lu, Michael S C ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ETCHING; MICROACTUATORS; MICROMACHINING; MICROSTRUCTURE; POLYSILICON; SILICA; TEMPERATURE;

OUT-OF-PLANE; REFERRED NOISE; RESONANT FREQUENCY; THERMAL TIME CONSTANT;

CMOS INTEGRATED CIRCUITS;

EID: 34250745177     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASSCC.2005.251814     Document Type: Conference Paper

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