Assembly inside a scanning electron microscope using electron beam induced deposition

IEEE International Conference on Intelligent Robots and Systems

Volumn , Issue , 2006, Pages 294-299

  Wich, T ^a   Sievers, T ^a   Fatikow, S ^a  

^a UNIVERSITY OF OLDENBURG   (Germany)

Author keywords

EBiD; Image processing; Microassembly; Microrobots

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRON BEAMS; IMAGE PROCESSING; NANOWIRES; REAL TIME SYSTEMS; SCANNING ELECTRON MICROSCOPY; SILICON;

ELECTRON BEAM INDUCED DEPOSITION (EBID); MICROASSEMBLY; MICROROBOTS; SILICON NANOWIRE;

ROBOTIC ASSEMBLY;

EID: 34250690743     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IROS.2006.282237     Document Type: Conference Paper

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