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Volumn , Issue , 2006, Pages 140-143
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Monolithic RF MEMS switch matrix integration
a a |
Author keywords
MEMS switches; Monolithic integration; RF MEMS; Switch matrices
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Indexed keywords
MICROWAVES;
MONOLITHIC INTEGRATED CIRCUITS;
SWITCHES;
THIN FILMS;
ELECTROMAGNETICALLY COUPLED INTERCONNECT NETWORK;
MEMS SWITCHES;
MONOLITHIC INTEGRATION;
RF MEMS;
SWITCH MATRICES;
MEMS;
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EID: 34250342204
PISSN: 0149645X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/MWSYM.2006.249414 Document Type: Conference Paper |
Times cited : (31)
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References (6)
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