Diagnosis of low-pressure methane plasma by optical emission spectroscopy

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology

Volumn 27, Issue 3, 2007, Pages 203-207

  Luo, Lixia ^a,b   Wu, Weidong ^b   Sun, Weiguo ^a   Tang, Yongjian ^b   Zhu, Yonghong ^a,b  

^a SICHUAN UNIVERSITY   (China)

^b RESEARCH CENTER OF LASER FUSION   (China)

Author keywords

Helical wave discharge; Methane plasma; Optical emission spectroscopy

Indexed keywords

DIAGNOSIS; ELECTRIC DISCHARGES; OPTICAL EMISSION SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; VACUUM DEPOSITED COATINGS;

HELICAL WAVE DISCHARGE; IN-SITU DIAGNOSE; METHANE PLASMA;

METHANE;

EID: 34250304354     PISSN: 16727126     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)