Application of Kitamori's Method to Stage Positioning Control

Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

Volumn 65, Issue 636, 1999, Pages 3252-3259

  Wakui, Shinji ^a  

^a CANON INC   (Japan)

Author keywords

Kitamori's Method; PID; Positioning; Stage; Tuning

Indexed keywords

EID: 34250202807     PISSN: 03875024     EISSN: None     Source Type: Journal    
DOI: 10.1299/kikaic.65.3252     Document Type: Article

References (0)