Microstructural evolution and piezoelectric properties of thick Pb(Zr,Ti)O3 films deposited by the multi-sputtering method: Part II. Piezoelectric properties

Journal of Materials Research

Volumn 22, Issue 5, 2007, Pages 1373-1377

  Park, Chee Sung ^a   Lee, Jae Wung ^a   Park, Gun Tae ^a   Kim, Hyoun Ee ^a   Choi, Jong Jin ^b  

^a Seoul National University   (South Korea)

^b Korea Institute of Machine and Materials   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; FERROELECTRICITY; MAGNETRON SPUTTERING; METALLOGRAPHIC MICROSTRUCTURE; MICROSTRUCTURAL EVOLUTION; PIEZOELECTRICITY; THICK FILMS;

MULTI-SPUTTERING METHOD; RADIO FREQUENCY MAGNETRON SPUTTERING METHOD;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 34250189799     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0177     Document Type: Article

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