Microstructural evolution and piezoelectric properties of thick Pb(Zr,Ti)O3 films deposited by multi-sputtering method: Part I. Microstructural evolution

Journal of Materials Research

Volumn 22, Issue 5, 2007, Pages 1367-1372

  Park, Chee Sung ^a   Lee, Jae Wung ^a   Park, Gun Tae ^a   Kim, Hyoum Ee ^a   Choi, Jong Jin ^b  

^a Seoul National University   (South Korea)

^b Korea Institute of Machine and Materials   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; METALLOGRAPHIC MICROSTRUCTURE; MICROSTRUCTURAL EVOLUTION; PIEZOELECTRICITY; SEMICONDUCTING SILICON; SUBSTRATES; THICK FILMS;

MULTI-SPUTTERING METHOD; RADIO FREQUENCY MAGNETRON SPUTTERING METHOD; STRUCTURAL STABILITY;

SEMICONDUCTING LEAD COMPOUNDS;

EID: 34250188390     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0176     Document Type: Article

References (18)

1. 3 (PZT) crystallization technique using flash lamp for ferroelectric RAM (FeRAM) embedded LSIs and one transistor type FeRAM devices. Jpn. J. Appl. Phys. 41, 2630 (2002).
2. D.L. Polla and L.F. Francis: Ferroelectric thin films in microelectromechanical systems applications. MRS Bull. 21, 59 (1996).
3. S.M. Spearing: Materials issues in microelectromechanical systems (MEMS). Acta Mater. 48, 179 (2000).
4. A.G. Evans and J.W. Hutchison: The thermomechanical integrity of thin films and multilayers. Acta Metall. Mater. 43, 2507 (1995).
5. Y.C. Zhou, Z.Y. Yang, and X.J. Zheng: Residual stress in PZT thin films prepared by pulsed laser deposition. Surf. Coat. Technol. 162, 202 (2003).
6. G-T. Park, J-J. Choi, C-S. Park, J-W. Lee, and H-E. Kim: Piezoelectric and ferroelectric properties of 1-μ-thick lead zinconate titanate film fabricated by a double-spin coating process. Appl. Phys. Lett. 85, 2322 (2004).
7. D.A. Barrow, T.E. Petroff, R.P. Tandon, and M. Sayer: Characterization of thick lead zirconate titanate films fabricated using a new sol gel-based process. J. Appl. Phys. 81, 876 (1997).
8. K. Yao, X. He, Y. Xu, and M. Chen: Screen-printed piezoelectric ceramic thick films with sintering additives introduced through a liquid-phase approach. Sens. Actuators A 118, 342 (2005).
9. C.V. Thompson and R. Carel: Stress and grain growth in thin film. J. Mech. Phys. Solids 44, 657 (1996).
10. C.V. Thompson: Structure evolution during processing of poly-crystalline films. Annu. Rev. Mater. Sci. 30, 159 (2000).
11. W.D. Nix: Mechanical properties of thin films. Metall. Trans. A 20A, 2217 (1989).
12. W.W. Mullins: The effect of thermal grooving on grain boundary motion. Acta Metall. 6, 414 (1958).
13. F.Y. Genin: Effect of stress on grain boundary motion in thin films. J. Appl. Phys. 77, 5130 (1995).
14. L.M. Klinger, E.E. Glickman, V.E. Fradkov, W.W. Mullins, and C.L. Bauer: Extensions of thermal grooving for arbitrary grain-boundary flux. J. Appl. Phys. 78, 3833 (1995).
15. 3 thick film. J. Mater. Res. 19, 3671 (2004).
16. I.M. Reaney, K. Brools, R. Klissurska, C. Pawlaczyk, and N. Setter: Use of transmission electron microscopy for the characterization of rapid thermally annealed, solution-gel, lead zirconate titanate films. J. Am. Ceram. Soc. 77, 1209 (1994).
17. K.G. Brooks, I.M. Reaney, R. Klissurska, Y. Huang, L. Bursill, and N. Setter: Orientation of rapid thermally annealed lead zirconate titanate thin films on (111) Pt substrates. J. Mater. Res. 9, 2540 (1994).
18. S. Kalpat, X. Du, I.R. Abothu, A. Akiba, H. Goto, and K. Uchino: Effect of crystal orientation on dielectric properties of lead zircon titanate thin films prepared by reactive RF sputtering. Jpn. J. Appl. Phys. 40, 713 (2001).