Non-continuum material removal mechanism of surface polishing with ultra precision

Zhongguo Jixie Gongcheng/China Mechanical Engineering

Volumn 18, Issue 9, 2007, Pages 1032-1035

  Wang, Yongguang ^a   Zhao, Yongwu ^a   Wu, Yanling ^a   Luo, Jianbin ^b  

^a JIANGNAN UNIVERSITY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Chemical mechanical polishing; Model; Non continuum; Synergetic effect

Indexed keywords

EID: 34249978762     PISSN: 1004132X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)