Post deposition ultraviolet treatment of silicon nitride dielectric: Modeling and experiment

Materials Research Society Symposium Proceedings

Volumn 910, Issue , 2007, Pages 473-478

  Zubkov, Vladimir ^a   Balseanu, Mihaela ^a   Xia, Li Qun ^a   M'Saad, Hichem ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC EXCITATIONS; HYDROGEN REMOVAL; SILICON NITRIDE DIELECTRICS; TRANSISTOR PERFORMANCE;

CARRIER MOBILITY; EXCITED STATES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; TENSILE STRESS; ULTRAVIOLET RADIATION;

DIELECTRIC MATERIALS;

EID: 34249936693     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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