High speed two-photon laser nanofabrication of three-dimensional microstructures

Guangxue Jingmi Gongcheng/Optics and Precision Engineering

Volumn 15, Issue 4, 2007, Pages 441-446

  Dong, Xian Zi ^a   Duan, Xuan Ming ^a  

^a TECHNICAL INSTITUTE OF PHYSICS AND CHEMISTRY   (China)

Author keywords

Fabrication resolution; High speed fabrication; Three dimensional microstructure; Two photon polymerization

Indexed keywords

LASERS; MICROELECTROMECHANICAL DEVICES; MICROFABRICATION; MIRRORS; NANOTECHNOLOGY; OPTICAL RESOLVING POWER; PHOTONIC CRYSTALS; PHOTONS; POLYMERIZATION; SCANNING; SPEED; THREE DIMENSIONAL;

FABRICATION RESOLUTION; HIGH SPEED FABRICATION; THREE DIMENSIONAL MICROSTRUCTURE; TWO PHOTON POLYMERIZATION;

MICROSTRUCTURE;

EID: 34249930760     PISSN: 1004924X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

1. KAWATA S, SUN H B, TANAKA T, et al.. Finer features for functional microdevices[J]. Nature, 2001, 412: 697-698.
2. SUN H B, TAKADA K, KAWATA S. Elastic force analysis of functional polymer submicron oscillators[J]. Appl. Phys. Lett., 2001, 79(19): 3173-3175.
3. GALAJDA P, ORMOS P. Rotation of microscopic propellers in laser tweezers[J]. J. Opt. B: Quant. Semiclass. Opt.. 2002, 4(2): 78-81.
4. KANEKO K, SUN H B, DUAN X M, et al.. Submicron diamond-lattice photonic crystals produced by two-photon laser nanofabrication[J]. Appl. Phys. Lett., 2003, 83(11): 2091-2093.
5. SUN H B, SUWA T, TAKADA K, et al.. Shape precompensation in two-photon laser nanowriting of photonic lattices[J]. Appl. Phys. Lett., 2004, 85(17): 3708-3710.
6. GUO R, LI Z Y, JIANG Z W, et al.. Log-pile photonic crystal fabricated by two-photon photopolymerization[J]. J. Opt. A: Pure. Appl. Opt., 2005, 7: 396-399.
7. SEET K K, MIZEIKIS V, JUODKAZIS S, et al.. Three-demensional horizontal circular spiral photonic crystals with stop gaps below 1 μm[J]. Appl. Phys. Lett., 2006, 88(22): 2211-2213.
8. TATON A, NORRIS D J. Defective promise in photonics[J]. Nature, 2002, 416(18): 685-686.
9. YOKOYAMA S, NAKAHAMA T, MIKI H, el al.. Two-photon-induced polymerization in a laser gain medium for optical microstructure[J]. Appl. Phys. Lett., 2003, 82(19): 3221-3223.
10. DUAN X M, SUN H B, KANEKO K, et al.. Two-photon polymerization of metal ions doped acrylate monomers and oligomers for three-dimensional structure fabrication[J]. Thin Solid Film, 2004, 453-454: 518-521.
11. WU P W, CHENG W, IGNAGIO B, et al.. Two-photon photographic production of three-dimensional metallic structures within a dielectric matrix[J]. Advan. Mater., 2000, 12(19): 1438-1441.
12. KATO J I, TAKEYASU N, ADAGHI Y, et al.. Multiple-spot parallel processing for laser micronanofabrication[J]. Appl. Phys. Lett., 2005, 86(4): 044-102.
13. TANAKA T, SUN H B, KAWATA S. Rapid sub-diffraction-limit laser micro/nanoprocessing in a threshold material system[J]. Appl. Phys. Lett., 2002, 80(2): 312-314.
14. TAKADA K, SUN H B, KAWATA S. Improved spatial resolution and surface roughness in photopolymerization-based laser nanowriting[J]. Appl. Phys. Lett., 2005, 86(7): 071122(1-3).