Interactions of Ge atoms with high-κ oxide dielectric surfaces

Materials Research Society Symposium Proceedings

Volumn 879, Issue , 2005, Pages 37-42

  Stanley, Scott K ^a   Ekerdt, John G ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GERMANIUM; HAFNIUM COMPOUNDS; OXIDATION; TUNGSTEN; X RAY PHOTOELECTRON SPECTROSCOPY;

DIELECTRIC SURFACES; THERMAL CRACKING;

DIELECTRIC MATERIALS;

EID: 34249930668     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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