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Volumn 1, Issue , 2003, Pages 197-200
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Nitrogen dioxide sensing properties of tellurium based films by thermal treatment
a a,b c a b |
Author keywords
Annealing; Charge carrier processes; Conductive films; Conductivity; Crystals; Electric resistance; Nitrogen; Semiconductor films; Tellurium; Temperature sensors
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Indexed keywords
ANNEALING;
CRYSTALS;
ELECTRIC CONDUCTIVITY;
ELECTRIC RESISTANCE;
FILM GROWTH;
MOLECULES;
NITROGEN;
NITROGEN OXIDES;
SEMICONDUCTING TELLURIUM;
TELLURIUM;
TEMPERATURE SENSORS;
CHARGE CARRIER PROCESS;
ELECTRICAL AND SENSING PROPERTIES;
ELECTRICAL RESISTANCES;
LONE PAIR ELECTRONS;
NITROGEN DIOXIDES;
SEMI-CONDUCTOR SURFACES;
SEMICONDUCTOR FILMS;
STRUCTURAL EVOLUTION;
CONDUCTIVE FILMS;
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EID: 34249898552
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SMICND.2003.1251376 Document Type: Conference Paper |
Times cited : (1)
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References (9)
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