Mechanism of solid phase crystallization of prepatterned nanoscale α-Si pillars

Journal of Applied Physics

Volumn 101, Issue 10, 2007, Pages

  Cho, Hyun Jin ^a   Greene, Brian J ^a,b   Hoyt, Judy L ^a,c   Plummer, James D ^a  

^a STANFORD UNIVERSITY   (United States)

^b IBM RESEARCH   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; DENSITY (SPECIFIC GRAVITY); GROWTH (MATERIALS); NANOSTRUCTURED MATERIALS; NUCLEATION; TRANSMISSION ELECTRON MICROSCOPY;

HIGH TEMPERATURE ANNEALING; NUCLEATION SITES; PILLAR DIAMETER; SOLID PHASE CRYSTALLIZATION;

SILICON;

EID: 34249881885     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2734531     Document Type: Article

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