Simulation of KrF laser ablation of Al 2 O 3 -TiC

Applied Surface Science

Volumn 253, Issue 18, 2007, Pages 7585-7590

  Oliveira, V ^a   Colaco R ^a   Vilar, R ^a  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

AFM; Al 2 O 3 TiC; Finite element simulation; Laser ablation; SEM

Indexed keywords

ATOMIC FORCE MICROSCOPY; CERAMIC PRODUCTS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; KRYPTON; LASER ABLATION; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; SURFACE TOPOGRAPHY;

COLUMNAR SURFACE TOPOGRAPHY; GLOBULE STANDS; TIME EVOLUTION;

ALUMINUM COMPOUNDS;

EID: 34249881639     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.03.070     Document Type: Article

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