Control of oxygen contamination during the growth of optical calcium fluoride and calcium strontium fluoride crystals

Progress in Crystal Growth and Characterization of Materials

Volumn 53, Issue 2, 2007, Pages 79-116

  Mouhovski, J T ^a  

^a INSTITUTE OF MINERALOGY AND CRYSTALLOGRAPHY   (Bulgaria)

Author keywords

A1. Characterization; A1. Contamination; A2. Growth from melt; B1. Fluorides; B2. Optical materials

Indexed keywords

CHEMICAL REACTORS; CONTAMINATION; CRYSTAL GROWTH; FLUORSPAR; OPTICAL MATERIALS; OXYGEN; WATER VAPOR;

CALCIUM STRONTIUM FLUORIDE; CRYSTAL CHEMICAL REACTIONS; REACTOR CHAMBER; SCAVENGERS;

CALCIUM FLUORIDE;

EID: 34249872720     PISSN: 09608974     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.pcrysgrow.2007.03.001     Document Type: Review

References (84)

1. Stockbarger D.C. J. Opt. Soc. Am. 39 (1949) 731
2. Yushkin N.P., Volkova N.V., and Markova G.A. Opticheskii Fljuorit (1983), Nauka, Moskva (in Russian)
3. Stockbarger D.C. Faraday Soc. 5 (1949) 294 (Discussion)
4. Jones D.A., Jones R.V., and Stevenson R.W.H. In: Peiser St. (Ed). Crystal Growth. Proceedings of an International Conference on Crystal Growth, Boston, June 1966 B4 (1967) 57
5. Stepanov I.V., and Feofilov P.P. Rost Kristalov, tom I, Akad Nauk SSSR 229 (1957) (in Russian)
6. Stepanov I.V., and Vasileva M.A. Rost Kristalov, tom III, Akad Nauk SSSR 233 (1961) (in Russian)
7. Chernevskaya E.G., Simchun E.A., and Stojarov A.I. OMP 2 (1970) 42 (in Russian)
8. Chernevskaya E.G., Lovkov A.V., Vasileva M.A., Tihomirov A.I., and Figurnov I.I. OMP 8 (1971) 41 (in Russian)
9. Cope D.R. Laser Focus World (Jan. 1992) 107
10. L. Aschke (EUVL Proj. Man.), Schott Lithotec INFO, Mainz. , 2001.
11. Aaron Hand (Man. Ed.), Semiconductor International. , 2/1/2002.
12. 2 crystals for microlithography, 11.07. , 2001.
13. J. Burnett, Z. Levine, E. Shirley, Physics Laboratory, Atomic Physics Divisions, NIST, Plasma Radiation Group, (Online July 12, 2001).
14. D.C. Allan, N.F. Borrelli, C.M. Smith, R.W. Sparrow, US Provisional Application Ser. No. 60/322,408, filed Sept. 14, 2001.
15. D.C. Allan, N.F. Borrelli, C.M. Smith, R.W. Sparrow, US Provisional Application Ser. No. 60/408,331, filed Sept. 4, 2002.
16. Shamovski L.M. Avt. Svid. SSSR 4976 (1937)
17. Bridgman P.W. Proc. Am. Acad. Arts Sci. 60 6 (1925) 305
18. Stober K. Z. Kristallogr. 61 (1925) 299
19. Tamman G., and Veszi. Z. Anorg. Chem. 150 (1926) 355
20. Wilke K.Th. In: Mitarbeit von Bohm J. (Ed). Kristall zuchtung (1973), Verl. der Wissenst chaften, Berlin (in German)
21. Chang Ch.E., Yip V.F.S., and Wilcox W.R. J. Cryst. Growth 22 (1974) 247
22. Stepanov I.V., Vasileva M.A., and Sheftal N.N. Rost Kristalov, tom III, Akad Nauk SSSR 239 (1961) (in Russian)
23. ma Vsesoyuzna konferentzia po rostu kristallov. Simpozium po molekuljarno-luchevoj epitaksii. Razchireni tezisi, tom III. Rost cristallov iz rasplava, AN SSSR, Minist. Himich. Promyshlenosti, Moskva, 1988, p. 366 (in Russian).
24. Bruch H., Gorlich P., Karras H., and Lehmann R. Phys. Stat. Sol. 4 (1964) 658
25. Naumann R.J. J. Cryst. Growth 58 (1982) 554
26. Naumann R.J. J. Cryst. Growth 58 (1982) 569
27. Bagdasarov H.S. Rost Kristalov, tom XII, Razdel IV, Nauka 179 (1961) (in Russian)
28. Sokolov V.A., Sinev A.N., Gusev I.B., and Nikolaev V.I. OMP 9 (1984) 28 (in Russian)
29. Jasinski T., and Witt A.F. J. Cryst. Growth 67 (1984) 173
30. Jones D.A., and Jones R.V. Proc. Phys. Soc. 79 (1962) 351
31. V.A. Sokolov, A.N. Sinev, B.I. Kvashnin, Seria "Elektrotermiya", vyp. 11[207], 4 (1979) (in Russian).
32. Carlson F.M. J. Cryst. Growth 68 (1984) 747
33. Mouchovski J.T., Penev V.Tz., and Kuneva R.B. Cryst. Res. Technol. 31 6 (1996) 727
34. Deshko V.I., Karvatzkji A.Y., Sokolov V.A., and Hlebnikov O.E. OMP 8 (1986) 28 (in Russian)
35. Jones C.L., Capper P., and Gosney J.J. J. Cryst. Growth 56 (1982) 581
36. Kalinina M.P., Avhutskji L.M., Borozdin S.N., and Petrovskji G.T. Opt. Zh. 5 (1994) 48 (in Russian)
37. Marguliès M., Witomski P., and Duffar T. J. Cryst. Growth 266 1 (2004) 175
38. Muller G., and Friedrich J. J. Cryst. Growth 266 1 (2004) S.1-S.19
39. Guggenheim H. J. Appl. Phys. 32 7 (1961) 1337
40. Chernevskaya E.G. OMP 12 (1969) 40 (in Russian)
41. Guggenheim H. J. Appl. Phys. 34 8 (1963) 2482
42. M. Robinson, D.M. Cripe, US Patent No. 3,649,552 of Mar.14, C09k1/4, 1972.
43. Pastor R.C., and Arita K. Mater. Res. Bull. 10 (1975) 493
44. R.C. Pastor, K. Arita, M. Robinson, US Patent No. 3,935,302 of Jan. 27, Int. Cl. C01F 11/22, 1976.
45. A.C. Pastor, US Patent No. 4,110,080 of Aug. 29, Int. Cl. B01J 17/20, 1978.
46. R.C. Pastor, A.C. Pastor, US Patent No. 4,076,574, Feb. 28, Int. Cl. B01J 17/08; C01D 3/20, 1978.
47. A.C. Pastor, R.C. Pastor, K. Arita, US Patent No. 4,379,733 of Apr. 12, Int. Cl. C30B 11/00, 1983.
48. Pastor R.C. J. Cryst. Growth 75 1 (1986) 54
49. Chernevskaya E.G., and Korneva Z.N. OMP 4 (1972) 30 (in Russian)
50. Molev G.V., Bozhevolnov V.E., Korobkov V.I., and Karelin V.V. J. Cryst. Growth 19 (1973) 117
51. K.A. Pandelisev, US Patent No. 5,993,540 of November 30, 1999.
52. K.A. Pandelisev, US Patent No. 6,071,339 of June 6, 2000.
53. K.A. Pandelisev, US Patent No. 6,153,011 of November 28, 2000.
54. K.A. Pandelisev, in: Second International Symposium on 157 Lithography, Data Point, CA, USA, May 14-17, 2001.
55. Chris Van Peski. The current state of calcium fluoride: an overview. Future Fab International vol. 11 (June 29, 2001).
56. Osiko V.V., Voron'ko Yu.K., and Sobol A.A. In: Freyhardt H.C. (Ed). Growth and Defect Structures 38 (1984), Springer-Verlag, Berlin, Heidelberg, New York, Tokyo
57. Holter M.R. Fundamentals of Infrared Technology (1962), Macmillan, New York
58. B. Wang, M. Ward, R. Rockwell, J. List, Photonic Spectra, 62, Nov. 2002.
59. 60Co γ-ray irradiation, Bircon, Saint-Global, Industrial Ceramics, Inc (1998).
60. Aaron Hand, Innovation Awarded Program, Automation & Assembly Summit, April 18-20, Sheraton Lakeside Chalet, St. Louis, MO. Molecular Nanotechnology & Manufacturing. , 2005.
61. Hayes W., and Stoneham A.M. In: Hayes W. (Ed). Crystals with Fluoride Structure. Electronic, Vibrational, and Defect Properties. Part 4 Colour Centers vol. 185 (1974), Clarendon Press, Oxford
62. Mysovsky A.S., Radzhabov E.A., Reichling M., Shluger A.L., and Sushko P.V. Phys. Stat. Sol. (c) 1 (2005) 392-396
63. Mehta G.D., Morse T.F., Mason E.A., and Daneshpajooh M.H. J. Chem. Phys. 64 10 (1976) 3917
64. 2 - NACID - CNTB, Sofia, pp. 327 + 223 pp. Appendix, 2006 (in Bulgarian).
65. W. Geintze, Vvedjenie v vakuumnuju tehniku. Tom I. Fizitzeskie osnovy vakuumnoj tehniki. M., L., Gosud. energet. Izdatelstvo, 1960, pp. 347 (in Russian, transl. from Germany).
66. Arhangelskaya V.A., Reiterov V.M., and Smolyanskii P.L. Neorg. Mater. 12 9 (1976) 1560 (in Russian)
67. Mouchovski J.T., Genov V.B., Pirgov L.V., and Penev V.Tz. Mater. Res. Innovat. 3 3 (1999) 138
68. Ko J.M., Tozava S., Yoshikawa A., Inaba K., Shishido T., Oba T., Oyama Y., Kuwabara T., and Fukuda T. J. Cryst. Growth 222 (2001) 243
69. W. Bolmann, Verfahren zur Herstellung von Calciumfluorid-Einkristallen fur optische Zwecke, DDR-Patentschrift, No. 213,514 of September 12, 1984 (in German).
70. E.G. Chernevskaya, E.D. Kalita, Avt. Svid. SSSR, No. 324,219 of February 23, 1972 (in Russian).
71. Mouchovski J.T., Penev V.Tz., and Kuneva B.B. Cryst. Res. Technol. 31 (1996) 727-737
72. J.T. Mouchovsli, Avt. Svid. No. 49,870, IPM-BAN, Sofia, with priority of Aug. 15, 1989, 1994 (in Bulgarian).
73. Mouchovski J.T., Haltakov I.V., and Lyutskanov V.L. J. Cryst. Growth 162 (1996) 79
74. Leckebusch R., and Recker K. J. Cryst. Growth 13/14 (1972) 276 (in German)
75. Prakash V. Indian J. Technol. 2 2 (1964) 46
76. B.P. Zidarova, D.Sc. Thesis, Institute of Applied Mineralogy, Bulgarian Academy of Sciences, Sofia, National library, 1989 (in Bulgarian).
77. Detcheva A., and Havezov I. Bulg. Chem. Ind. 72 3 (2001) 65
78. A. Detcheva, J. Hassler, Univ. of Plovdiv "Paissii Hilendarski", Bulgaria, Scientific Works - Chemistry, 30 (5), 31 (2001).
79. Schron W., Detcheva A., Dressler B., and Danzer K. Fresenius J. Anal. Chem. 361 (1998) 106
80. Detcheva A., Dressler B., Hassler J., and Schroen V. In: Vogt C., Wennrich R., and Werner G. (Eds). CANAS'97-Colloquium Analytische Atomspektroskopie (1998), Universitaet Leipzig und UFZ Umweltforschungszentrum Leipzig - Kalle GmgH, Leipzig S.383-S.389
81. Weston G.F. Ultrahigh Vacuum Practice (1985), Butterworth, London, Boston, Durban, Singapore, Sydney, Toronto, Wellington
82. G. Girshfelder, Ch. Kertiss, R. Berd, Molekuljarmaja teoria gazov i jidkosteji, M., Izgatelstvo, "Inostr. Literatura", 1961, pp. 929 (in Russian, transl. from English).
83. Weller P.F., Axe J.D., and Pettit G.D. J. Electrochem. Soc. 112 (1965) 74
84. O.A. Krasilschikova, A.N. Taraschan, A.N. Platonov, Okraska i ljuminestzentziya prirodnogo fljuorita, Kiev, Izd., "Naykova Dumka", Glava 2, 18, 1986 (in Russian).