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Volumn 90, Issue 22, 2007, Pages

Investigation of point defect generation in dry etched InP ridge waveguide structures

Author keywords

[No Author keywords available]

Indexed keywords

CATHODOLUMINESCENCE; DRY ETCHING; INDIUM PHOSPHIDE; INDUCTIVELY COUPLED PLASMA; REACTIVE ION ETCHING; WAVEGUIDES;

INTRINSIC DEFECTS; NONRADIATIVE RECOMBINATION CENTERS; WAVEGUIDE STRUCTURES;

DEFECTS;

EID: 34249864380 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2743384 Document Type: Article

Times cited : (7)

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