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Volumn , Issue , 2006, Pages 296-299

Low power electrostatic helmholtz-resonance microjet generator for propulsion and cooling

Author keywords

Buckled Electrode; Electrostatic actuator; Helmholtz resonance; Micro jet and propulsion

Indexed keywords

AIR; ELECTRODES; ELECTROSTATIC GENERATORS; ELECTROSTATICS; JETS; MICROSYSTEMS; PROPULSION; RESONANCE; SILICON WAFERS; SOLID-STATE SENSORS; THERMAL MANAGEMENT (ELECTRONICS);

EID: 34249855040     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (3)

References (7)
  • 3
    • 14044249473 scopus 로고    scopus 로고
    • Large-deflection out-of-plane electrostatic buckled-electrode actuator
    • pp
    • H. Kim, K. Najafi, P. D. Washabaugh, and L. P. Bernal, "Large-deflection out-of-plane electrostatic buckled-electrode actuator," Transducers '03, pp. 794-797, 2003.
    • (2003) Transducers '03 , pp. 794-797
    • Kim, H.1    Najafi, K.2    Washabaugh, P.D.3    Bernal, L.P.4
  • 4
    • 0036194607 scopus 로고    scopus 로고
    • Fabrication of out-of-plane curved surfaces in Si by utilizing RIE lag
    • pp
    • Chout KA and Najafi K, "Fabrication of out-of-plane curved surfaces in Si by utilizing RIE lag," MEMS '02, pp.145-8, 2002.
    • (2002) MEMS '02 , pp. 145-148
    • Chout, K.A.1    Najafi, K.2
  • 5
    • 0032620399 scopus 로고    scopus 로고
    • "Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam-sensitive glass
    • vol., no., pp
    • Gimkiewicz C, Hagedorn D, Jahns J, Kley E-B, and Thoma F, "Fabrication of microprisms for planar optical interconnections by use of analog gray-scale lithography with high-energy-beam-sensitive glass," Applied-Optics, vol.38, no.14, pp.2986-90, 1999.
    • (1999) Applied-Optics , vol.38 , Issue.14 , pp. 2986-2990
    • Gimkiewicz, C.1    Hagedorn, D.2    Jahns, J.3    Kley, E.-B.4    Thoma, F.5
  • 6
    • 0025661782 scopus 로고
    • Spiral microstructures for the measurement of average straingradients in thin films
    • pp
    • L.-S. Fan, R. S. Muller, W. Yun, R. T. Howe, and J. Huang, "Spiral microstructures for the measurement of average straingradients in thin films," MEMS '90, pp. 177-181, 1990.
    • (1990) MEMS '90 , pp. 177-181
    • Fan, L.-S.1    Muller, R.S.2    Yun, W.3    Howe, R.T.4    Huang, J.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.