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That is to say, λ is the flux of precursors from the gas phase per unit element, so that λΔt are the precursors originated from the gas phase in the unit element during the interval Δt
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That is to say, λ is the flux of precursors from the gas phase per unit element, so that λΔt are the precursors originated from the gas phase in the unit element during the interval Δt.
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Our set of equations are based on the following: we assume that the step Δt is long enough so that all the precursors previously present in a unit element at time t either decompose or out-diffuse from the element, which is justified by the extremely low growth rate we used. As a consequence, on average, we can treat the number of nondecomposed precursors in a unit element at a time t, Δt as the result of the number of precursors deposited during the interval Δt plus those supplied by diffusion from the nearest neighbors, as any preexisting precursor will have either decomposed or outdiffused. The number of nondecomposed precursors at a certain instant t inside the element, ni(f, will then evolve in the time Δt according to ni,(t, Δt, λΔt, Σj(nni) 1/3(1, adjΔt)njt, where adj is the rate of precursor decomposition. The summation is limited only to near
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Michelini, F.; Dupertuis, M.-A.; Kapon, E. Appl Phys. Lett. 2004, 84, 4086. Michelini, F. et al., unpublished results.
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It can be shown that probabilities scale exactly with doubling the pattern pitch
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It can be shown that probabilities scale "exactly" with doubling the pattern pitch.
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