FePt patterned media fabricated by deep UV lithography followed by sputtering or PLD

IEEE Transactions on Magnetics

Volumn 43, Issue 6, 2007, Pages 2157-2159

  Qiu, L J ^a   Ding, J ^a   Adeyeye, A O ^a   Yin, J H ^a   Chen, J S ^a,b   Goolaup, S ^a   Singh, N ^a,c  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b DATA STORAGE INSTITUTE   (Singapore)

^c INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Deep ultraviolet lithography; FePt; Patterned media; Pulsed laser deposition; Sputtering

Indexed keywords

LITHOGRAPHY; MAGNETIC FILMS; PULSED LASER DEPOSITION; SPUTTERING; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

DEEP ULTRAVIOLET LITHOGRAPHY; GRADIENT FORCE MAGNETOMETRY; PATTERNED MEDIA;

IRON ALLOYS;

EID: 34249080592     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2007.893135     Document Type: Article

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