SCOPUS 정보 검색 플랫폼

Volumn 28, Issue 2, 2007, Pages 161-170

Thin-film nanocapacitor and its characterization

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; MICROELECTRODES; MICROFABRICATION; PERMITTIVITY; SPUTTER DEPOSITION; THIN FILMS;

DIP-COATING TECHNIQUES; THIN-FILM CHARACTERIZATION; THIN-FILM NANOCAPACITORS;

NANOTECHNOLOGY;

EID: 34249048284 PISSN: 01430807 EISSN: 13616404 Source Type: Journal
DOI: 10.1088/0143-0807/28/2/002 Document Type: Article

Times cited : (2)

References (16)

1
- 85178858729
- Tuszynski J A and Dixon J M 2002 Eur. J. Phys. 23 591
- (2002) Eur. J. Phys. , vol.23 , Issue.5 , pp. 591
- Tuszynski, J.A.¹ Dixon, J.M.²

2
- 0004071509
- Siegel R W 1999 Nanostructure Science and Technology: A Worldwide Study (Washington, DC: National Science and Technology Council)
- (1999) Nanostructure Science and Technology: A Worldwide Study
- Siegel, R.W.¹

3
- 0345635952
- Stupp S 2002 Small Wonders, Endless Frontiers: A Review of the National Nanotechnology Initiative (Washington, DC: National Academy Press)
- (2002) Small Wonders, Endless Frontiers: A Review of the National Nanotechnology Initiative
- Stupp, S.¹

4
- 0036431727
- Roco M C 2002 Int. J. Eng. Educ. 18 488
- (2002) Int. J. Eng. Educ. , vol.18 , Issue.5 , pp. 488
- Roco, M.C.¹

5
- 33744550462
- Gayathri V and Geetha R 2006 J. Phys.: Conf. Ser. 34 824
- (2006) J. Phys.: Conf. Ser. , vol.34 , Issue.1 , pp. 824
- Gayathri, V.¹ Geetha, R.²

6
- 85178862207
- Jia D, Wilhelm J, Freed J, Best D and Goonewardene A 2006 ESC Trans. 2
- (2006) ESC Trans. , vol.2
- Jia, D.¹ Wilhelm, J.² Freed, J.³ Best, D.⁴ Goonewardene, A.⁵

7
- 31944441851
- Jia D and Goonewardene A 2006 Appl. Phys. Lett. 88 053105
- (2006) Appl. Phys. Lett. , vol.88
- Jia, D.¹ Goonewardene, A.²

8
- 0001958124
- Sputter deposition processes
- Thornton J A and Greene J E 1994 Sputter deposition processes Handbook of Deposition Technologies for Films and Coatings 2nd edn ed R F Bunshah (Park Ridge, NJ: Noyes) p 249
- (1994) Handbook of Deposition Technologies for Films and Coatings , pp. 249
- Thornton, J.A.¹ Greene, J.E.²

9
- 0003484845
- Brinker C J and Scherer G W 1989 Sol-gel Science (New York: Academic) p 1
- (1989) Sol-gel Science , pp. 1
- Brinker, C.J.¹ Scherer, G.W.²

10
- 85178863266
- Sol-gel method
- Jia W and Jia D 2006 Sol-gel method Phosphor Handbook ed W M Yen and M Yamamoto (New York: CRC Press)
- (2006) Phosphor Handbook
- Jia, W.¹ Jia, D.²

11
- 0003484845
- Brinker C J and Scherer G W 1989 Sol-gel Science (New York: Academic) p788
- (1989) Sol-gel Science , pp. 788
- Brinker, C.J.¹ Scherer, G.W.²

12
- 0000451798
- Scriven L E 1988 Better Ceramics Through Chemitry III ed C J Briker, D E Clark and D R Ulrich (Pittsburgh, PA: Mat. Res. Soc.) pp 717-29
- (1988) Better Ceramics Through Chemitry III , pp. 717-729
- Scriven, L.E.¹

13
- 0016026914
- Spiers R P, Subaraman C V and Wilkinson W L 1974 Chem. Eng. Sci. 29 389-96
- (1974) Chem. Eng. Sci. , vol.29 , Issue.2 , pp. 389-396
- Spiers, R.P.¹ Subaraman, C.V.² Wilkinson, W.L.³

14
- 85178868271
- Landau L D and James P F 1986 J. Non-Cryst. Solids 82 366-96
- (1986) J. Non-Cryst. Solids , vol.82 , Issue.1-3 , pp. 366-396
- Landau, L.D.¹ James, P.F.²

15
- 0034188363
- Klauk H, Huang J, Nichols J A and Jackson T N 2000 Thin Solid Films 366 272
- (2000) Thin Solid Films , vol.366 , Issue.1-2 , pp. 272
- Klauk, H.¹ Huang, J.² Nichols, J.A.³ Jackson, T.N.⁴

16
- 84933207793
- Soundheimer E H 1952 Adv. Phys. 1 1
- (1952) Adv. Phys. , vol.1 , Issue.1 , pp. 1
- Soundheimer, E.H.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.