Fabrication and structural characterization of metal films coated on cenosphere particles by magnetron sputtering deposition

Applied Surface Science

Volumn 253, Issue 17, 2007, Pages 7082-7088

  Yu, Xiaozheng ^a,c   Shen, Zhigang ^a,c   Xu, Zheng ^b   Wang, Sen ^c  

^a BEIHANG UNIVERSITY   (China)

^b GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS   (China)

^c China National Academy of Nanotechnology and Engineering   (China)

Author keywords

Cenosphere; Magnetron sputtering; Metal films

Indexed keywords

ATOMIC FORCE MICROSCOPY; COATINGS; CRYSTALLIZATION; FILM THICKNESS; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY;

CENOSPHERE; SPUTTERING RATE; ULTRASONIC VIBRATION GENERATOR;

METALLIC FILMS;

EID: 34249003763     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.02.059     Document Type: Article

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