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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 259, Issue 2, 2007, Pages 867-870

Mo-containing tetrahedral amorphous carbon deposited by dual filtered cathodic vacuum arc with selective pulsed bias voltage

(5) Pasaja, Nitisak a Sansongsiri, Sakon a Intarasiri, Saweat a Vilaithong, Thiraphat a Anders, André b

a CHIANG MAI UNIVERSITY (Thailand)

b UNIVERSITY OF CALIFORNIA (United States)

Author keywords

Electrical resistivity; Metal doping filtered cathodic vacuum arc; Profilometry; Raman spectroscopy; Rutherford backscattering; Tetrahedral amorphous carbon

Indexed keywords

ELECTRIC POTENTIAL; MOLYBDENUM; PROFILOMETRY; RAMAN SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SHEET RESISTANCE; VACUUM APPLICATIONS;

CARBON PLASMA; METAL DOPING FILTERED CATHODIC VACUUM ARC; TETRAHEDRAL AMORPHOUS CARBON;

AMORPHOUS CARBON;

EID: 34248680771 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/j.nimb.2007.02.093 Document Type: Article

Times cited : (34)

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