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Volumn 6462, Issue , 2007, Pages
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New emerging MEMS applications
a
a
Yole Développement
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(France)
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Author keywords
Market analysis; MEMS
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Indexed keywords
ACCELEROMETERS;
ANEROID ALTIMETERS;
CONSUMER ELECTRONICS;
FUEL CELLS;
GYROSCOPES;
MICROPHONES;
PRESSURE SENSORS;
INTEGRATED CIRCUIT MANUFACTURERS;
MEMS MANUFACTURING;
MICRO FUEL CELLS;
SEMICONDUCTOR MANUFACTURERS;
MEMS;
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EID: 34248674115
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.696643 Document Type: Conference Paper |
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Times cited : (4)
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References (1)
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