Length scales for coherent π-bonding interactions in complex high-k oxide dielectrics and their interfaces

Microelectronic Engineering

Volumn 84, Issue 9-10, 2007, Pages 2298-2301

  Seo, H ^a   Lucovsky, G ^a   Fleming, L B ^a   Ulrich, M D ^a   Luning J ^b   Koster, G ^c   Geballe, T H ^c  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b STANFORD UNIVERSITY   (United States)

^c SLAC NATIONAL ACCELERATOR LABORATORY   (United States)

Author keywords

Length scales of order; Nanocrystalline complex oxides and complex oxide alloys; Spectroscopic studies

Indexed keywords

INTERFACES (MATERIALS); NANOCRYSTALLINE MATERIALS; OXIDES; PERMITTIVITY; X RAY ABSORPTION SPECTROSCOPY; X RAY DIFFRACTION;

COMPLEX OXIDE ALLOYS; LENGTH SCALES OF ORDER; NANOCRYSTALLINE COMPLEX OXIDES; NON-CRYSTALLINITY;

DIELECTRIC MATERIALS;

EID: 34248653767     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.04.069     Document Type: Article

References (6)

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