Simplified fabrication process of 3-D photonic crystal optical transmission filter

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6462, Issue , 2007, Pages

  Mehta, A ^a   Rumph, Raymond ^a   Roth, Zachary ^a   Johnson, Eric G ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

3 D photonic crystal; Electron beam lithography; Multilayer dielectric filter

Indexed keywords

LATTICE ARRAY; MULTILAYER DIELECTRIC FILTER; STOP BAND;

DIELECTRIC FILMS; ELECTRON BEAM LITHOGRAPHY; ETCHING; LIGHT TRANSMISSION; PHOTONIC CRYSTALS; THREE DIMENSIONAL;

OPTICAL FILTERS;

EID: 34248636797     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.716335     Document Type: Conference Paper

References (5)

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