Pneumatic actuating device with nanopositioning ability utilizing PZT impact force coupled with differential pressure

Precision Engineering

Volumn 31, Issue 3, 2007, Pages 293-303

  Liu, Yung Tien ^a   Jiang, Chia Chi ^a  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

Author keywords

Differential pressure; Impact force; Pneumatic cylinder; Precision positioning; PZT actuator

Indexed keywords

CONTROL EQUIPMENT; DEGREES OF FREEDOM (MECHANICS); PNEUMATIC EQUIPMENT; VIBRATIONS (MECHANICAL);

DIFFERENTIAL PRESSURE; IMPACT FORCE; PNEUMATIC CYLINDER; PRECISION POSITIONING; PZT ACTUATOR;

PIEZOELECTRIC ACTUATORS;

EID: 34248392692     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2007.01.004     Document Type: Article

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