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Volumn 14, Issue 1, 2007, Pages 31-41

Low energy ion scattering

Author keywords

Low energy ion scattering (LEIS); Polar and azimuthal scans; Shadowing and blocking cones; Single and multiple scattering

Indexed keywords

ATOMIC LAYER DEPOSITION; BACKSCATTERING; CHEMICAL ANALYSIS; STRUCTURE (COMPOSITION); SURFACE ANALYSIS;

EID: 34248143822     PISSN: 0218625X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0218625X07009001     Document Type: Article
Times cited : (7)

References (39)
  • 1
    • 0003937665 scopus 로고    scopus 로고
    • D. J. O'Connor, B. A. Sexton and R. St. C. Smart eds, 2nd edn, Springer-Verlag
    • D. J. O'Connor, B. A. Sexton and R. St. C. Smart (eds.) Surface Analysis Methods in Materials Science, 2nd edn. (Springer-Verlag, 2003).
    • (2003) Surface Analysis Methods in Materials Science
  • 9
    • 0003370998 scopus 로고
    • Ion Implantation Techniques
    • eds. H. Ryssel and H. Glawischning, Springer, Berlin, Heidelberg
    • J. P. Biersack and J. F. Ziegler, in Ion Implantation Techniques, eds. H. Ryssel and H. Glawischning, Springer Ser. Electrophys, Vol. 10 (Springer, Berlin, Heidelberg, 1982), pp. 122-156.
    • (1982) Springer Ser. Electrophys , vol.10 , pp. 122-156
    • Biersack, J.P.1    Ziegler, J.F.2
  • 11
    • 0022041724 scopus 로고
    • Comparison of theoretical and empirical interatomic potentials
    • D. J. O'Connor and J. P. Biersack, Comparison of theoretical and empirical interatomic potentials, Nucl. Instr. Meth. Phys. Res. B 15 (1986) 14.
    • (1986) Nucl. Instr. Meth. Phys. Res. B , vol.15 , pp. 14
    • O'Connor, D.J.1    Biersack, J.P.2
  • 19


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.