Aspects of micro structuring low temperature co-fired ceramic (LTCC) for realisation complex 3D objects by embossing

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1198-1201

  Andrijasevic, Daniela ^a   Smetana, Walter ^a   Zehetner, Johann ^b   Zoppel, Sandra ^b   Brenner, Werner ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^b Forschungszentrum Mikrotechnik   (Austria)

Author keywords

Ceramic; Embossing; MEMS structuring

Indexed keywords

LOW TEMPERATURE EFFECTS; MEMS; PROFILOMETRY; SCANNING ELECTRON MICROSCOPY; SURFACE PROPERTIES; THREE DIMENSIONAL;

EMBOSSING PROCESS; LOW TEMPERATURE CO FIRED CERAMIC (LTCC); MEMS STRUCTURING; OPTICAL INSPECTION;

CERAMIC PRODUCTS;

EID: 34247887527     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.152     Document Type: Article

References (3)

1. L. Rebenklau, Beitrage zm Aufbau und zur Technologie LTCC-basierter microfluidische Bauelemente und Systeme, PhD Thesis, TU Dresden, 2005.
2. Su B., Button T.W., Schneider A., Singleton L., and Prewett P. Microsystem Technologies 8 (2002)
3. http://www.ceramtec.com.