Nanoscale pore fabrication for high sensitivity waveguide-mode biosensors

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1685-1689

  Fujimaki, Makoto ^a   Rockstuhl, Carsten ^a   Wang, Xiaomin ^a   Awazu, Koichi ^a   Tominaga, Junji ^a   Ikeda, Takahiro ^b   Ohki, Yoshimichi ^b   Komatsubara, Tetsuro ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b WASEDA UNIVERSITY   (Japan)

^c UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Biosensor; Evanescent field; Ion irradiation; Nanopore; Waveguide mode

Indexed keywords

BIOSENSORS; HEAVY IONS; HYDROFLUORIC ACID; ION BOMBARDMENT; SENSITIVITY ANALYSIS; WAVEGUIDES;

ANGULAR POSITION; EVANESCENT-FIELD-COUPLED WAVEGUIDE; WAVEGUIDE-MODE BIOSENSORS;

NANOTECHNOLOGY;

EID: 34247640009     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.264     Document Type: Article

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