Deflection of microcantilever by growing vapor bubble

Sensors and Actuators, A: Physical

Volumn 136, Issue 2, 2007, Pages 717-722

  Lee, Heon Ju ^a   Chang, Young Soo ^a   Lee, Yoon Pyo ^a   Jeong, Kwang Hun ^b   Kim, Ho Young ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Seoul National University   (South Korea)

Author keywords

Bubble; Elastocapillarity; Microcantilever; Surface tension

Indexed keywords

BUBBLES (IN FLUIDS); CAPILLARITY; DEFLECTION (STRUCTURES); MICROACTUATORS; SURFACE TENSION;

ELASTOCAPILLARITY; MICROCANTILEVERS; MICROPUMPS; THIN SOLID STRUCTURE;

MICROSTRUCTURE;

EID: 34247636635     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.01.004     Document Type: Article

References (14)

1. Fan L.S., Tai Y.C., and Muller R.S. IC-processed electrostatic micromotors. Sens. Actuators 20 (1989) 41-47
2. Moroney R.M., White R.M., and Howe R.T. Microtransport induced by ultrasonic Lamb waves. Appl. Phys. Lett. 59 (1991) 774-776
3. Chu W.-H., Mehregany M., and Mullen R.L. Analysis of tip deflection and force of a bimetallic cantilever microactuator. J. Micromech. Microeng. 3 (1993) 4-7
4. Skobanek K.D., Kohl M., and Miyazaki S. Stress-optimised shape memory microactuator. Proc. SPIE 2779 (1996) 499-504
5. Lin L., Pisano A.P., and Lee A.P. Microbubble powered actuator. Proceedings of the International Conference on Solid-State Sensors and Actuators (1991) 1041-1044
6. Bergstrom P.L., Ji J., Liu Y.-N., Kaviany M., and Wise K.D. Thermally driven phase-change microactuation. J. Microelectromech. Syst. 4 (1995) 10-17
7. Xu C., Hall J., Richards C., Bahr D., and Richards R. Design of a mico heat engine. Proceedings of IMECE-MEMS, vol. 2 (2000) 261-267
8. Neagu C., Jansen H., Gardeniers H., and Elwenspoek M. The electrolysis of water: an actuation principle for MEMS with a big opportunity. Mechatronics 10 (2000) 571-581
9. Bohm S., Olthuis W., and Bergveld P. A bi-directional electrochemically-driven micro liquid dosing system with integrated sensor/actuator electrodes. Proceedings of IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) (2000) 92-95
10. Ho C.-T., Lin R.-Z., Chang H.-Y., and Lin C.-H. Micromachined electrochemical T-switches for cell sorting applications. Lab Chip 5 (2005) 1248-1258
11. Kim H.-Y., and Mahadevan L. Capillary rise between elastic sheets. J. Fluid Mech. 548 (2006) 141-150
12. Jurin J. An account of some experiments shown before the Royal Society; with an enquiry into the cause of the ascent and suspension of water in capillary tubes. Philos. Trans. 30 (1718) 739-747
13. Archer R.R., Cook N.H., Crandall S.H., Dahl N.C., Lardner T.J., McClintock F.A., Rabinowicz E., and Reichenbach G.S. An Introduction to the Mechanics of Solids. second ed. (1978), McGraw-Hill, Singapore
14. Jaeger R.C. Introduction to Microelectronic Fabrication. second ed. (2002), Prentice Hall, Upper Saddle River, NJ