Fabrication and characterization of a pressure sensor using a pitch-based carbon fiber

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1316-1319

  Park, C S ^a   Kang, B S ^a   Lee, D W ^a   Choi, T Y ^b   Choi, Y S ^a  

^a Chonnam National University   (South Korea)

^b Center for Advanced Research and Technology   (United States)

Author keywords

Carbon fiber; Dielectrophoresis; Pressure sensors

Indexed keywords

DIAPHRAGMS; ETCHING; MICROFABRICATION; PRESSURE SENSORS;

DIELECTROPHORESIS; PIEZORESISTIVE CHARACTERISTICS; PIEZORESISTIVE PRESSURE; PIEZORESISTORS;

CARBON FIBERS;

EID: 34247620815     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.068     Document Type: Article

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