Thickness dependence of structure and optical properties of silver films deposited by magnetron sputtering

Thin Solid Films

Volumn 515, Issue 17, 2007, Pages 6962-6966

  Sun, Xilian ^a,b   Hong, Ruijin ^a,b   Hou, Haihong ^a,b   Fan, Zhengxiu ^a   Shao, Jianda ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

Nanostructures; Optical properties; Silver; Sputtering; Thickness

Indexed keywords

DEPOSITION; FILM THICKNESS; MAGNETRON SPUTTERING; NANOSTRUCTURES; OPTICAL PROPERTIES; SILVER; SPECTROPHOTOMETRY;

INTERPLANAR DISTANCE; THICKNESS DEPENDENCE; X-RAY DIFFRACTION MEASUREMENTS;

THIN FILMS;

EID: 34247579621     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.02.017     Document Type: Article

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