Nanometer scale gaps for capacitive transduction improvement on RF-MEMS resonators

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1384-1387

  Torres, F ^a   Teva, J ^a   Lopez, J Ll ^a   Uranga, A ^a   Abadal, G ^a   Barniol, N ^a   Sanchez Amores A ^b   Montserrat, J ^b   Perez Murano F ^b   Esteve, J ^b  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Capacitive readout; Resonant RF MEMS

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; FINITE ELEMENT METHOD; MASKS; MEMS; NANOTECHNOLOGY; SILICON; TRANSDUCERS;

ACOUSTICAL RESONATORS; CAPACITIVE READOUT; CAPACITIVE TRANSDUCTION; RESONANT RF-MEMS;

RESONATORS;

EID: 34247576254     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.062     Document Type: Article

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