Fabrication of force sensors based on two-dimensional photonic crystal technology

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1450-1453

  Stomeo, T ^a   Grande, M ^a   Qualtieri, A ^a   Passaseo, A ^a   Salhi, A ^a   De Vittorio, M ^a   Biallo, D ^b   D'orazio, A ^b   De Sario, M ^b   Marrocco, V ^b   Petruzzelli, V ^b   Prudenzano, F ^b  

^a NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

^b POLITECNICO DI BARI   (Italy)

Author keywords

FDTD method; Microcavity; Photonic crystal; Sensors

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; FINITE DIFFERENCE METHOD; INDUCTIVELY COUPLED PLASMA; PHOTONIC CRYSTALS; RESONANCE; TIME DOMAIN ANALYSIS;

FORCE SENSORS; MICROCAVITY; RESOLUTION; STRAIN-SENSITIVE STRUCTURE;

OPTICAL SENSORS;

EID: 34247574239     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.227     Document Type: Article

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