SCOPUS 정보 검색 플랫폼

Surface and Interface Analysis

Volumn 39, Issue 5, 2007, Pages 397-404

Surface transient effects in ultralow-energy Cs+ sputtering of Si

(2) Chanbasha, A R a Wee, A T S a

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

Secondary ion mass spectroscopy; Sputter rate; Surface transient; Ultralow energy

Indexed keywords

ION BEAMS; SECONDARY ION MASS SPECTROMETRY; SENSITIVITY ANALYSIS; SURFACE PHENOMENA;

INCIDENT ANGLES; SPUTTER RATES; SURFACE TRANSIENT; ULTRALOW ENERGY;

SPUTTERING;

EID: 34247531558 PISSN: 01422421 EISSN: 10969918 Source Type: Journal
DOI: 10.1002/sia.2541 Document Type: Article

Times cited : (5)

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