Sub-target effect in film analysis using TEA CO2 laser-induced plasma

Current Applied Physics

Volumn 7, Issue 5, 2007, Pages 540-546

  Lee, Yong Inn ^a   Idris, Nasrullah ^b   Kurniawan, Koo Hendrik ^c   Lie, Tjung Jie ^c   Tsuyuki, Kenichiro ^d   Miura, Satoru ^d   Kagawa, Kiichiro ^e  

^a Chonbuk National University   (South Korea)

^b SYIAH KUALA UNIVERSITY   (Indonesia)

^c Res Center of Maju Makmur Mandiri   (Indonesia)

^d KAJIMA TECHNICAL RESEARCH INSTITUTE   (Japan)

^e UNIVERSITY OF FUKUI   (Japan)

Author keywords

Film samples; Laser induced low pressure plasma; Laser induced plasma; Sub target effect; TEA CO2 laser

Indexed keywords

CARBON DIOXIDE LASERS; FOCUSED ION BEAMS; SPECTRUM ANALYSIS; THIN FILMS;

FILM SAMPLES; LASER-INDUCED PLASMA; OPTICAL MULTICHANNEL ANALYZER (OMA);

PLASMAS;

EID: 34247528536     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2006.11.035     Document Type: Article

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