Characterization of active silicon microvalves with piezoelectric membrane actuators

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1202-1206

  Doll, A ^a   Wischke, M ^a   Schrag, H J ^a   Geipel, A ^a   Goldschmidtboeing, F ^a   Woias, P ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Active valve; Fluid flow; Piezo membrane actuator; Valve characterization; Viscous loss

Indexed keywords

COMPUTER SIMULATION; FLOW OF FLUIDS; MATHEMATICAL MODELS; PIEZOELECTRIC ACTUATORS; PUMPS; SILICON;

ACTIVE VALVES; PIEZO-MEMBRANE ACTUATORS; VALVE CHARACTERIZATION; VISCOUS LOSS;

PRODUCT DESIGN;

EID: 34247471113     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.034     Document Type: Article

References (5)

1. M. Koch, A. Evans, A. Brunschweiler, Microfluidic Technology and Applications, Taylor & Francis Group, ISBN: 0863802443, 1999.
2. Laser D.J., and Santiago J.G. J. Micromech. Microeng. 14 (2004)
3. M. Wischke, A. Doll, A. Geipel, F. Goldschmidtboeing, P. Woias, in: Proceedings of the Actuator 2006, Bremen, Germany, pp. 276-280.
4. Doll A., Heinrichs M., Goldschmidtboeing F., Schrag H.-J., Hopt U.T., and Woias P. J. Sensors Actuators A 130-131 (2006) 445-453
5. Goldschmidtböing F., Doll A., Heinrichs M., Woias P., Schrag H.-J., and Hopt U.T. J. Micromech. Microeng. 15 4 (2005) 673-683