Characterization of PZT Ferroelectric Thin Films by RF-magnetron Sputtering

Journal of Physics: Conference Series

Volumn 61, Issue 1, 2007, Pages 120-124

  Bi, Zhenxing ^a   Zhang, Zhisheng ^a   Fan, Panfeng ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 34247463443     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/61/1/025     Document Type: Article

References (8)

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5. Zhang Z, Li X and Chen J 2000 J. Tianjin University 33 378-381
6. Naoki W, Kazumasa K and Yi X 2000 Thin Solid Films 372 156-162
7. Wang P, Yu D and Liu M 1998 Piezoelectrics Acoustooptics 20 54-58
8. Cheng J, Luo L and Meng Z 2000 J. Functional Materials Devices 31 531-533