Thermal conductivity of meso-porous silicon prepared by the double-tank electrochemical corrosion method

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 28, Issue 3, 2007, Pages 420-424

  Fang, Zhenqian ^a   Hu, Ming ^a   Zhang, Wei ^a   Zhang, Xurui ^a   Yang, Haibo ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Effective thermal conductivity; Meso porous silicon; Micro Raman spectroscopy; Microelectro mechanical system; Microsensors; Theoretical model

Indexed keywords

CALCULATIONS; ELECTROCHEMICAL CORROSION; HEAT TRANSFER; MEMS; MICROSENSORS; POROSITY; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SPECIFIC HEAT; THERMAL CONDUCTIVITY; THERMAL INSULATION;

EFFECTIVE THERMAL CONDUCTIVITY (ETC); HEAT CAPACITY; MESOPOROUS SILICON; MICRO RAMAN SPECTROSCOPY; THEORETICAL MODEL; THERMAL INSULATION MATERIAL;

POROUS SILICON;

EID: 34247383602     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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