The dependence of the nanostructure of magnetron sputtered Cu-Ag alloy films on composition and temperature

Journal of Materials Research

Volumn 22, Issue 4, 2007, Pages 1018-1023

  Almtoft, K Pagh ^a   Ejsing, A M ^a   Bottiger J ^a   Chevallier, J ^a   Schell, N ^b   Martins, R M S ^b  

^a AARHUS UNIVERSITY   (Denmark)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHARACTERIZATION; CHEMICAL ANALYSIS; CRYSTAL STRUCTURE; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; NANOCRYSTALLINE MATERIALS; PHASE TRANSITIONS; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

MAGNETRON SPUTTERED ALLOY FILMS; NANOCRYSTALLINE STRUCTURE; PHASE FORMATION; X-RAY BEAM;

COPPER ALLOYS;

EID: 34247371784     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0121     Document Type: Article

References (13)

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