Process engineering and failure analysis of MEMS and MOEMS by Digital Holography Microscopy (DHM)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6463, Issue , 2007, Pages

  Montfort, Frédéric ^a   Emery, Yves ^a   Marquet, François ^a   Cuche, Etienne ^a   Aspert, Nicolas ^a   Solanas, Eduardo ^a   Mehdaoui, Alexandre ^b   Ionescu, Adrian ^b   Depeursinge, Christian ^b  

^a Lyncee Tec SA   (Switzerland)

^b EPFL   (Switzerland)

Author keywords

Digital holography microscopy; Dynamical analysis; Failure analysis; Interferometer resolution; MEMS MOEMS

Indexed keywords

CAPACITORS; FAILURE ANALYSIS; HOLOGRAPHY; MICROSCOPIC EXAMINATION; PROCESS CONTROL;

DIGITAL HOLOGRAPHY MICROSCOPY (DHM); EXCITATION FREQUENCIES; INTERFEROMETER RESOLUTION; PERIODIC MOVEMENT ANALYSIS;

MEMS;

EID: 34247369754     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.699837     Document Type: Conference Paper

References (2)

1. Denis Gabor, "A new microscopic principle", Nature, 1948.
2. Etienne Cuche, Pierre Marquet, and Christian Depeursinge "Simultaneous amplitude-contrast and quantitative phasecontrast microscopy by numerical reconstruction of Fresnel off-axis holograms", Appl. Opt. 38, pp. 6994 - 7001, (1999)