Development of wireless MEMS sensor for RFID tag and temperature/pressure monitoring

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6463, Issue , 2007, Pages

  Wang, Wen ^a   Lee, K ^a   Kim, T ^a   Yang, S ^a  

^a Ajou University   (South Korea)

Author keywords

Network analyzer; Pressure sensor; RFID tag; Surface acoustic wave; Temperature sensor

Indexed keywords

ACOUSTIC WAVES; ELECTRONIC DOCUMENT IDENTIFICATION SYSTEMS; FINITE ELEMENT METHOD; PRESSURE SENSORS; SURFACE WAVES; TEMPERATURE SENSORS;

NETWORK ANALYZER; SURFACE ACOUSTIC WAVES;

MEMS;

EID: 34247357780     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.721021     Document Type: Conference Paper

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