Ge deep sub-micron HiK/MG pFETs with superior drive compared to Si HiK/MG state-of-the-art reference

Semiconductor Science and Technology

Volumn 22, Issue 1, 2007, Pages

  De Jaeger, B ^a   Kaczer, B ^a   Zimmerman, P ^b   Opsomer, K ^c   Winderickx, G ^a   Van Steenbergen, J ^a   Van Moorhem, E ^a   Terzieva, V ^a   Bonzom, R ^c   Leys, F ^a   Arena, C ^d   Bauer, M ^d   Werkhoven, C ^d   Caymax, M ^a   Meuris, M ^a   Heyns, M ^a  

^a IMEC   (Belgium)

^b Intel Corporation Belgium   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

^d ASM AMERICA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRON MOBILITY; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES;

LONG-CHANNEL CONVENTIONAL DEVICES; PFET; PROCESS FLOWS; RING-SHAPED DEVICES;

FIELD EFFECT TRANSISTORS;

EID: 34247237337     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/22/1/S52     Document Type: Article

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