Quantitative amplitude and phase contrast imaging in a scanning transmission X-ray microscope

Ultramicroscopy

Volumn 107, Issue 8, 2007, Pages 644-655

  Hornberger, Benjamin ^a   Feser, Michael ^a   Jacobsen, Chris ^a  

^a STONY BROOK UNIVERSITY   (United States)

Author keywords

Configured detector; Phase contrast; Phase recovery; Segmented detector; X ray microscopy

Indexed keywords

COHERENT LIGHT; IMAGE ANALYSIS; LIGHT ABSORPTION; SCANNING TUNNELING MICROSCOPY; X RAY ANALYSIS; X RAY MICROSCOPES;

FOURIER FILTER RECONSTRUCTION; PHASE CONTRAST IMAGING; SCANNING TRANSMISSION X-RAY MICROSCOPE;

IMAGE QUALITY;

GERMANIUM;

ABSORPTION SPECTROSCOPY; AMPLITUDE MODULATION; ARTICLE; CONTRAST ENHANCEMENT; FOURIER ANALYSIS; IMAGING; PHASE CONTRAST MICROSCOPY; QUANTITATIVE ANALYSIS; RADIATION DOSE; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SEPARATION TECHNIQUE;

FOURIER ANALYSIS; GERMANIUM; IMAGE PROCESSING, COMPUTER-ASSISTED; MICROSCOPY, ELECTRON, SCANNING TRANSMISSION; MICROSCOPY, PHASE-CONTRAST; X-RAYS;

EID: 34247235535     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2006.12.006     Document Type: Article

References (53)

1. S. Aoki, Y. Kagoshima, Y. Suzuki (Eds.), in: Proceedings of the Eighth International Conference on X-ray Microscopy, IPAP Conference Series 7, Institute of Pure and Applied Physics, Japan (IPAP), 2006.
2. Feser M., Jacobsen C., Rehak P., DeGeronimo G., Holl P., and Strüder L. Novel integrating solid state detector with segmentation for scanning transmission soft X-ray microscopy. In: McNulty I. (Ed). X-ray Micro- and Nano-Focusing: Applications and Techniques II vol. 4499 (2001), Society of Photo-Optical Instrumentation Engineers (SPIE), Bellingham, Washington, DC 117-125
3. Feser M., Hornberger B., Jacobsen C., De Geronimo G., Rehak P., Holl P., and Strüder L. Nucl. Instrum. Methods Phys. Res. A 565 (2006) 841
4. Landauer M.N., McCallum B.C., and Rodenburg J.M. Optik 100 1 (1995) 37
5. McCallum B.C., Landauer M.N., and Rodenburg J.M. Optik 101 2 (1995) 53
6. McCallum B.C., Landauer M.N., and Rodenburg J.M. Optik 103 3 (1996) 131
7. Einstein A. Verh. Dtsch. Phys. Ges. 9 12 (1918) 86
8. Larsson A., Siegbahn M., and Waller I. Die Naturwissenschaften 12 52 (1924) 1212
9. Henke B.L. Low energy X-ray interactions: photoionization, scattering, specular and Bragg reflection. In: Attwood D.T., and Henke B.L. (Eds). Low Energy X-ray Diagnostics vol. 75 (1981), American Institute of Physics, Monterey, New York 146-155
10. Henke B.L., Gullikson E.M., and Davis J.C. At. Data Nucl. Data Tables 54 (1993) 181
11. Schmahl G., and Rudolph D. Proposal for a phase contrast X-ray microscope. In: Cheng P.C., and Jan G.J. (Eds). X-ray Microscopy: Instrumentation and Biological Applications (1987), Springer, Berlin 231-238
12. Momose A. Jpn. J. Appl. Phys. 44 9A (2005) 6355
13. Morrison G.R. Some aspects of quantitative X-ray microscopy. In: Benattar R. (Ed). X-ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation vol. 1140 (1989), Society of Photo-Optical Instrumentation Engineers (SPIE), Bellingham, Washington, DC 41-49
14. Morrison G.R. Phase contrast and darkfield imaging in X-ray microscopy. In: Jacobsen C., and Trebes J. (Eds). Soft X-ray Microscopy vol. 1741 (1992), Society of Photo-Optical Instrumentation Engineers (SPIE), Bellingham, Washington, DC 186-193
15. F. Polack, D. Joyeux, Soft X-ray interferential scanning microscopy: a feasibility assessment, in: V.V. Aristov, A.I. Erko, (Eds.), X-ray Microscopy IV, Bogorodskii Pechatnik, Chernogolovka, Russia, 1994, pp. 432-437, Proceedings of the Fourth International Conference, Chernogolovka, Russia, September 20-24, 1993.
16. F. Polack, D. Joyeux, D. Phalippou, Phase contrast experiments on the NSLS-X1A scanning microscope, in: J. Thieme, G. Schmahl, E. Umbach, D. Rudolph (Eds.), X-ray Microscopy and Spectromicroscopy, Springer, Berlin, 1998, pp. I-105-I-109.
17. D. Joyeux, F. Polack, A wavefront profiler as an insertion device for scanning phase contrast microscopy, in: J. Thieme, G. Schmahl, E. Umbach, D. Rudolph (Eds.), X-ray Microscopy and Spectromicroscopy, Springer, Berlin, 1998, pp. II-201-I-205.
18. Kaulich B., Polack F., Neuhäusler U., Susini J., di Fabrizio E., and Wilhein T. Opt. Express 10 (2002) 1112
19. Kaulich B., Wilhein T., Fabrizio E.D., Romanato F., Altissimo M., Cabrini S., Fayard B., and Susini J. J. Opt. Soc. Am. A 19 4 (2002) 797
20. M. Feser, C. Jacobsen, P. Rehak, G. DeGeronimo, Scanning transmission X-ray microscopy with a segmented detector, in: J. Susini, D. Joyeux, F. Polack (Eds.), Proceedings of the Seventh International Conference on X-ray Microscopy, ESRF, Grenoble, France, July 28-August 2, 2002, J. Phys. IV 104 (2003) 529.
21. Dekkers N.H., and de Lang H. Optik 41 4 (1974) 452
22. Rose H. Ultramicroscopy 2 (1977) 251
23. Hawkes P.W. J. Opt. (Paris) 9 4 (1978) 235
24. Rodenburg J.M., and Bates R.H.T. Philos. Trans. R. Soc. London A 339 (1992) 521
25. Chapman H. Ultramicroscopy 66 (1996) 153
26. Chapman H., Jacobsen C., and Williams S. Rev. Sci. Instrum. 66 2 (1995) 1332
27. Morrison G.R., and Niemann B. Differential phase contrast X-ray microscopy. In: Thieme J., Schmahl G., Umbach E., and Rudolph D. (Eds). X-ray Microscopy and Spectromicroscopy (1998), Springer, Berlin I-85-I-94
28. Eaton W.J., Morrison G.R., and Waltham N.R. Configured detector system for STXM imaging. In: Meyer-Ilse W., Warwick T., and Attwood D. (Eds). X-ray Microscopy: Proceedings of the Sixth International Conference (2000), American Institute of Physics, Melville, NY 452-457
29. G. Morrison, W.J. Eaton, R. Barnett, P. Charalambous, STXM imaging with a configured detector, in: J. Susini, D. Joyeux, F. Polack (Eds.), in: Proceedings of the Seventh International Conference on X-ray Microscopy, ESRF, Grenoble, France, July 28-August 2, 2002, J. Phys. IV 104 (2003) 547.
30. Morrison G.R., Gianoncelli A., Kaulich B., Bacescu D., and Kovac J. A fast-readout CCD system for configured-detector imaging in STXM. In: Aoki S., Kagoshima Y., and Suzuki Y. (Eds). Proceedings of the Eighth International Conference on X-ray Microscopy, IPAP Conference Series 7 (2006), Institute of Pure and Applied Physics, Japan (IPAP) 377-379
31. Wiesemann U., Thieme J., Früke R., Guttmann P., Niemann B., Rudolph D., and Schmahl G. Nucl. Instrum. Methods Phys. Res. A 467-468 (2001) 861
32. Waddell E., and Chapman J. Optik 54 (1979) 83
33. Morrison G.R., and Chapman J.N. Optik 64 1 (1983) 1
34. Kagoshima Y., Shimose K., Koyama T., Wada I., Saikubo A., Hayashi K., Tsusaka Y., and Matsui J. Jpn. J. Appl. Phys. 43 11A (2004) L1449
35. Feser M., Carlucci-Dayton M., Jacobsen C.J., Kirz J., Neuhäusler U., Smith G., and Yu B. Applications and instrumentation advances with the Stony Brook scanning transmission X-ray microscope. In: McNulty I. (Ed). X-ray Microfocusing: Applications and Techniques vol. 3449 (1998), Society of Photo-Optical Instrumentation Engineers (SPIE), Bellingham, Washington, DC 19-29
36. Palmer J.R., and Morrison G.R. Differential phase contrast imaging in the scanning transmission X-ray microscope. In: Bucksbaum P.H., and Ceglio N.M. (Eds). OSA Proceedings on Short Wavelength Coherent Radiation: Generation and Applications vol. 11 (1991), Optical Society of America, Washington, DC 141-145
37. Zeitler E., and Thomson M.G.R. Optik 31 (1970) 258,359
38. Thomson M.G.R. Optik 39 1 (1973) 15
39. Burge R.E., and Dainty J.C. Optik 46 3 (1976) 229
40. Michette A.G. Optical Systems for Soft X-Rays (1986), Plenum, New York
41. J.W. Goodman, Introduction to Fourier Optics, McGraw-Hill, New York, 1968, p. 85. Note that the question of forward or inverse Fourier transform depends on the form by which waves are represented; in our case exp [- i (kz - ω t)].
42. Sheppard C.J.R., and Wilson T. Optik 73 (1986) 39
43. Saleh B.E.A. Opt. Acta 26 6 (1979) 777
44. J.R. Palmer, G.R. Morrison, Differential phase contrast imaging in X-ray microscopy, in: A.G. Michette, G.R. Morrison, C.J. Buckley (Eds.), X-ray Microscopy III, Springer Series in Optical Sciences, vol. 67, Springer, Berlin, 1992, pp. 278-280.
45. Spector S., Jacobsen C., and Tennant D. J. Vac. Sci. Technol. B 15 6 (1997) 2872
46. Press W.H., Teukolsky S.A., Vetterling W.T., and Flannery B.P. Numerical Recipes in C: The Art of Scientific Computing. second ed. (1992), Cambridge University Press, Cambridge (Chapter 13.3)
47. Gonzalez R.C., and Woods R.E. Digital Image Processing. second ed. (2002), Prentice-Hall, Englewood Cliffs, NJ (Chapter 5.8)
48. Jacobsen C., Williams S., Anderson E., Browne M.T., Buckley C.J., Kern D., Kirz J., Rivers M., and Zhang X. Opt. Commun. 86 (1991) 351
49. S.J. Spector, Diffractive optics for soft X-rays, Ph.D. Thesis, Department of Physics, State University of New York at Stony Brook, 1997.
50. Ade H., Zhang X., Cameron S., Costello C., Kirz J., and Williams S. Science 258 (1992) 972
51. C. Jacobsen, S. Wang, W. Yun, S. Frigo, Calculation of X-ray refraction from near-edge absorption data only, in: R. Soufli, J. Seely (Eds.), Optical Constants of Materials for UV to X-ray Wavelengths, vol. 5538, SPIE, 2004, pp. 5538-03.
52. Horowitz P., and Howell J.A. Science 178 (1972) 608
53. Hornberger B., Feser M., Jacobsen C., Vogt S., Legnini D., Paterson D., Rehak P., De Geronimo G., and Palmer B.M. Combined fluorescence and phase contrast imaging at the Advanced Photon Source. In: Aoki S., Kagoshima Y., and Suzuki Y. (Eds). Proceedings of the Eighth International Conference on X-ray Microscopy, IPAP Conference Series 7 (2006), Institute of Pure and Applied Physics, Japan (IPAP) 396-398