Control of InN quantum dot density using rare gases in metal organic vapor phase epitaxy

Applied Physics Letters

Volumn 90, Issue 15, 2007, Pages

  Ruffenach, S ^a   Briot, O ^a   Moret, M ^a   Gil, B ^a  

^a UNIVERSITÉ MONTPELLIER 2   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; HELIUM; NITROGEN; SEMICONDUCTOR QUANTUM DOTS; VAPOR PHASE EPITAXY;

METAL ORGANIC VAPOR PHASE EPITAXY; QUANTUM DOT DENSITY; SURFACE DENSITY;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 34247219241     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2721124     Document Type: Article

References (15)

1. D. Guimard, M. Nishioka, S. Tsukamoto, and Y. Arakawa, Appl. Phys. Lett. 89, 183124 (2006).
2. D. Guimard, S. Tsukamoto, M. Nishioka, and Y. Arakawa, Appl. Phys. Lett. 89, 083116 (2006).
3. A. Michon, G. Saint-Girons, G. Beaudouin, I. Sagnes, L. Largeau, and G. Patriarche, Appl. Phys. Lett. 87, 253114 (2005).
4. Y. Nakamura, Y. Nagadomi, K. Sugie, N. Miyata, and M. Ichikawa, J. Appl. Phys. 95, 5014 (2004).
5. J. Wu, W. Walukiewicz, K. M. Yu, J. W. Ager III, E. E. Haller, H. Lu, W. J. Schaff, Y. Saito, and Y. Nanishi, Appl. Phys. Lett. 80, 3967 (2002).
6. V. Yu. Davydov, A. A. Klochikhin, R. P. Seisyan, V. V. Emtsev, S. V. Ivanov, F. Bechstedt, J. Furthmuller, H. Harima, A. V. Mudryi, J. Aderhold, O. Semchinova, and J. Graul, Phys. Status Solidi B 229, R1 (2002).
7. V. Yu. Davydov, A. A. Klochikhin, V. V. Emtsev, D. A. Kurdyukov, S. V. Ivanov, V. A. Vekshin, F. Bechstedt, J. Furthmuller, J. Aderhold, J. Graul, A. V. Mudryi, H. Harima, A. Hashimoto, A. Yamamoto, and E. E. Haller, Phys. Status Solidi B 234, 787 (2002).
8. W. Walukiewicz, S. X. Li, K. M. Yu, J. W. Ager, E. E. Haller, H. Lu, and W. J. Schaff, J. Cryst. Growth 269, 119 (2004).
9. O. Briot, B. Maleyre, and S. Ruffenach, Appl. Phys. Lett. 83, 2919 (2003).
10. W. C. Ke, C. P. Fu. C. Y. Chen, L. Lee, C. S. Ku, W. C. Chou, W. H. Chang, M. C. Lee, W. K. Chen, W. J. Lin, and Y. C. Chen, Appl. Phys. Lett. 88, 191913 (2006).
11. S. Ruffenach, B. Maleyre, O. Briot, and B. Gil, Phys. Status Solidi C 2, 826 (2005).
12. S. P. Fu and Y. F. Chen, Appl. Phys. Lett. 85, 1523 (2004).
13. J. W. Miller, P. N. Shah, and C. L. Yaws, Chem. Eng. (New York, NY) 83, 153 (1976).
14. R. Reid, J. M. Prausnitz, and B. E. Poling, The Properties of Gases and Liquids (McGraw-Hill, New York, 1987), Chaps. 10 and 11.
15. P. E. Fewster, X-ray Scattering from Semiconductors (Imperial College Press, London, 2003), Chap. 2, p. 73.