A single etch-step fabrication-tolerant polarization splitter

Journal of Lightwave Technology

Volumn 25, Issue 3, 2007, Pages 740-746

  Augustin, Luc M ^a   van der Tol, Jos J G M ^a   Hanfoug, Rabah ^b   de Laat, Wim J M ^c   van de Moosdijk, Michael J E ^c   van Dijk, Paul W L ^c   Oei, Yok Siang ^a   Smit, Meint K ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b MAPPER Lithography BV   (Netherlands)

^c ASML   (Netherlands)

Author keywords

Indium phosphide; Integrated devices; Polarization splitter

Indexed keywords

BIREFRINGENCE; COMPUTER SIMULATION; ETCHING; LIGHT POLARIZATION; OPTICAL BEAM SPLITTERS; OPTICAL WAVEGUIDES; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE;

ETCH-STEP PASSIVE POLARIZATION-SPLITTER; POLARIZATION SPLITTER; TRANSVERSE ELECTRIC (TE); TRANSVERSE MAGNETIC (TM);

OPTICAL FIBER FABRICATION;

EID: 34247149034     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2006.890430     Document Type: Article

References (10)

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