Design of microstereolithography system based on dynamic image projection for fabrication of three-dimensional microstructures

Journal of Mechanical Science and Technology

Volumn 20, Issue 12, 2006, Pages 2094-2104

  Choi, Jae Won ^a   Ha, Young Myoung ^a   Lee, Seok Hee ^a   Choi, Kyung Hyun ^b  

^a Pusan National University   (South Korea)

^b Jeju National University   (South Korea)

Author keywords

Curing; Digital Micromirror Device (DMD); Microstereolithography; Microstructures

Indexed keywords

EID: 34247099368     PISSN: 1738494X     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02916326     Document Type: Article

References (24)

1. Bertsch, A., Jezequel, J. Y. and Andre, J. C., 1997, "Study of the Spatial Resolution of a New 3D Microfabrication Process : the Microstereo-photolithography Using a Dynamic Mask-Generator Technique," Journal of Photochemistry and Photobiology A: Chemistry 107, pp. 275-281.
2. Bertsch, A., Bernhard, P., Vogt, C. and Renaud, P., 2000, "Rapid Prototyping of Small Size Objects," Rapid Prototyping Journal, Vol. 6, No. 4, pp. 259-266.
3. Bertsch, A., Jiguet, S. and Renaud, P., 2004, "Microfabrication of Ceramic Components by Microstereolithography," Journal of Micromechanics and Microengineering, Vol. 14, pp. 197-203.
4. st International Conference on Precision Engineering and Micro/Nano Technology in Asia, Shenzhen, China, pp. 472-476.
5. Farsari, M., Claret-Tournier, F., Huang, S., Chatwin, C. R., Budgett, D. M., Birch, P. M., Young, R. C. D. and Richardson, J. D., 2000, "A Novel High-Accuracy Microstereolithography Method Employing an Adaptive Electro-optic Mask," Journal of Materials Processing Technology 107, pp. 167-172.
6. Fischer, R. E. and Tadic-Galeb, B., 2000, Optical System Design, McGraw-Hill, pp. 35-47.
7. th IEEE Workshop on Micro Electro Mechanical Systems (MEMS'93), pp. 42-47.
8. th IEEE Workshop on Micro Electro Mechanical Systems (MEMS'96), Piscataway, NJ, USA, pp. 301-306.
9. th IEEE Workshop on Micro Electro Mechanical Systems (MEMS'98), Heidelberg, Germany, pp. 290-295.
10. th IEEE Workshop on Micro Electro Mechanical Systems (MEMS '99), Orlando, Florida, USA, pp. 376-381.
11. Kim, D. S., Lee, I. H., Kwon, T. H. and Cho, D. W., 2005, "Development of a Three-Dimensional Barrier Embedded Kenics Micromixer by Means of a Micro-Stereolithography Technology," Journal of KSME A, Vol. 29, No. 6, pp. 904-912.
12. Lee, I. H., Cho, Y. H., Cho, D. W. and Lee, E. S., 2004, "Development of Micro-Stereolithography System for the Fabrication of Three-Dimensional Micro-Structures," Journal of KSPE, Vol. 21, No. 3, pp. 171-179.
13. Lee, I. H. and Cho, D. W., 2004, "An Investigation on Photopolymer Solidification Considering Laser Irradiation Energy in Micro-Stereolithography, " Microsystem Technologies, Vol. 10, No. 8, pp. 592-598.
14. Limaye, A. S., 2004, Design and Analysis of a Mask Projection Micro-Stereolithography System, M.S. Thesis, Georgia Institute of Technology.
15. Maruo, S., Ikuta, K. and Korogi, 2003, "Force-Controllable, Optically Driven Micromachines Fabricated by Single-Step Two-Photon Microstereolithography," Journal of Microelectromechanical Systems, Vol. 12, No. 5, pp. 533-539.
16. th International Symposium on Laser Precision Microfabrication, Proceedings of SPIE, Vol. 5662, Bellingham, WA, pp. 649-654.
17. Park, S. H., Lim, T. W. and Yang, D. W., 2005, "Fabrication of Three-Dimensional Micro-Shell Structures Using Two-Photon Polymerization," Journal of KSME A, Vol. 29, No. 7, pp. 998-1004.
18. Park, S. H., Lim, T.W. and Yang, D. Y., 2006, "Investigation into Direct Fabrication of Nano-Patterns Using Nano-Stereolithography (NSL) Process," Journal of KSPE, Vol. 23, No. 3, pp. 156-162.
19. Provin, C. and Monneret, S., 2002, "Complex Ceramic-Polymer Composite Microparts Made by Microstereolithography," IEEE Transactions on Electronics Packaging Manufacturing, Vol. 25, No. 1, pp. 59-63.
20. Smith, L. B., 2004, Micro-Cross-Sectional Lithography (μCSL™) : Prototyping and Packaging for MEMS, Ph. D. Thesis, Rensselaer Polytechnic Institute.
21. Sun, C. and Zhang, X., 2002, "Experimental and Numerical Investigations on Microstereolithography of Ceramics," Journal of Applied Physics, Vol. 92, No. 8, pp. 4796-4802.
22. Sun, C., Fang, N., Wu, D. M. and Zhang, X., 2005, "Projection Micro-Stereolithography Using Digital Micro-Mirror Dynamic Mask," Sensors and Actuators A : Physical, Vol. 121, Issue 1, 31, pp. 113-120.
23. Varadan, V. K., Jiang, X. and Varadan, V. V., 2001, Microstereolithography and other Fabrication Techniques for 3D MEMS, Wiley.
24. Zhang, X., Jiang, X.N. and Sun, C., 1999, "Micro-Stereolithography of Polymeric and Ceramic Microstructures," Sensors and Actuators 77, pp. 149-156.