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Physica E: Low-Dimensional Systems and Nanostructures

Volumn 38, Issue 1-2, 2007, Pages 148-151

Visible photoluminescence from silicon nanoclusters embedded in silicon nitride films prepared by remote plasma-enhanced chemical vapor deposition

(8) Benami, A a Santana, G a Monroy, B M a Ortiz, A a Alonso, J C a Fandino J a Aguilar Hernandez J b Contreras Puente, G b

a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO (Mexico)

b INSTITUTO POLITÉCNICO NACIONAL (Mexico)

Author keywords

Nanoclusters; Photoluminescence; RPECVD; Silicon

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; HEAT TREATMENT; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; QUANTUM CONFINEMENT; SILICON NITRIDE; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOCLUSTERS SURFACE; ULTRAVIOLET VISIBLE TRANSMISSION MEASUREMENTS;

NANOCLUSTERS;

EID: 34147223505 PISSN: 13869477 EISSN: None Source Type: Journal
DOI: 10.1016/j.physe.2006.12.047 Document Type: Article

Times cited : (9)

References (13)

1
- 17644428371
- Pei Z., and Hwang H.L. Appl. Surf. Sci. 212 (2003) 760
- (2003) Appl. Surf. Sci. , vol.212 , pp. 760
- Pei, Z.¹ Hwang, H.L.²

2
- 34147207928
- Kim B.H., Cho C.H., Kim T.W., Park N.M., Sung G.Y., and Park S.J. Appl. Phys. Lett. 86 (2005) 011908
- (2005) Appl. Phys. Lett. , vol.86 , pp. 011908
- Kim, B.H.¹ Cho, C.H.² Kim, T.W.³ Park, N.M.⁴ Sung, G.Y.⁵ Park, S.J.⁶

3
- 31544438879
- Santana G., Monroy B.M., Ortiz A., Huerta L., Alonso J.C., Fandiño J., Aguilar-Hernández L., Hoyos E., Cruz-Gandarilla F., and Contreras-Puentes G. Appl. Phys. Lett. 88 (2006) 041916
- (2006) Appl. Phys. Lett. , vol.88 , pp. 041916
- Santana, G.¹ Monroy, B.M.² Ortiz, A.³ Huerta, L.⁴ Alonso, J.C.⁵ Fandiño, J.⁶ Aguilar-Hernández, L.⁷ Hoyos, E.⁸ Cruz-Gandarilla, F.⁹ Contreras-Puentes, G.¹⁰

4
- 1942542400
- Iacona F., Bongiorno C., and Spinella C. J. Appl. Phys. 95 (2004) 3723
- (2004) J. Appl. Phys. , vol.95 , pp. 3723
- Iacona, F.¹ Bongiorno, C.² Spinella, C.³

5
- 20844446973
- Chen L.Y., Chen W.H., and Hong F.C.N. Appl. Phys. Lett. 86 (2005) 193506
- (2005) Appl. Phys. Lett. , vol.86 , pp. 193506
- Chen, L.Y.¹ Chen, W.H.² Hong, F.C.N.³

6
- 18444385890
- Cheng X.Q., Sun J.M., Kogler R., Skorupa W., Moller W., and Prucnal S. Vacuum 78 (2005) 667
- (2005) Vacuum , vol.78 , pp. 667
- Cheng, X.Q.¹ Sun, J.M.² Kogler, R.³ Skorupa, W.⁴ Moller, W.⁵ Prucnal, S.⁶

7
- 0032334777
- Alonso J.C., Vazquez R., Ortiz A., Pankov V., and Andrade E. J. Vac. Sci. Technol. A16 (1998) 3211
- (1998) J. Vac. Sci. Technol. , vol.A16 , pp. 3211
- Alonso, J.C.¹ Vazquez, R.² Ortiz, A.³ Pankov, V.⁴ Andrade, E.⁵

8
- 31144477849
- Fandiño J., Santana G., Rodríguez-Fernández L., Cheang-Wong J.C., Ortiz A., and Alonso J.C. J. Vac. Sci. Technol. A 23 (2005) 248
- (2005) J. Vac. Sci. Technol. A , vol.23 , pp. 248
- Fandiño, J.¹ Santana, G.² Rodríguez-Fernández, L.³ Cheang-Wong, J.C.⁴ Ortiz, A.⁵ Alonso, J.C.⁶

9
- 0028282315
- Aguilar-Hernández J., Contreras-Puente G., Figueroa-Estrada J.M., and Zelaya-Angel O. Jpn. J. Appl. Phys. 33 (1994) 37
- (1994) Jpn. J. Appl. Phys. , vol.33 , pp. 37
- Aguilar-Hernández, J.¹ Contreras-Puente, G.² Figueroa-Estrada, J.M.³ Zelaya-Angel, O.⁴

10
- 17144372279
- Santana G., Fandiño J., ortiz A., and Alonso J.C. J. Non-Cryst. Solids 351 (2005) 922
- (2005) J. Non-Cryst. Solids , vol.351 , pp. 922
- Santana, G.¹ Fandiño, J.² ortiz, A.³ Alonso, J.C.⁴

11
- 31744436718
- Tsu D.V., Lucovsky G., and Mantini M.J. Phys. Rev. B (1986) 7069
- (1986) Phys. Rev. B , pp. 7069
- Tsu, D.V.¹ Lucovsky, G.² Mantini, M.J.³

12
- 0017959228
- Lanford W.A., and Rand M.J. J. Appl. Phys. 49 (1978) 2473
- (1978) J. Appl. Phys. , vol.49 , pp. 2473
- Lanford, W.A.¹ Rand, M.J.²

13
- 0035873288
- Shih A., Yeh S.H., Lee S.C., and Yang T.R. J. Appl. Phys. 89 (2001) 5355
- (2001) J. Appl. Phys. , vol.89 , pp. 5355
- Shih, A.¹ Yeh, S.H.² Lee, S.C.³ Yang, T.R.⁴

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