Silicon nanoparticles formation in annealed SiO/SiO2 multilayers

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 38, Issue 1-2, 2007, Pages 50-53

  Kovacevic I ^a   Dubcek P ^a   Duguay, S ^b   Zorc, H ^a   Radic N ^a   Pivac, B ^a   Slaoui, A ^b   Bernstorff, S ^c  

^a RUDER BO KOVI INSTITUTE   (Croatia)

^b Faculté de Médecine   (France)

^c SINCROTRONE TRIESTE   (Italy)

Author keywords

Si nanostructures; SiO SiO2 amorphous superlattice; Small angle X ray scattering

Indexed keywords

AMORPHOUS SILICON; DEPOSITION; MULTILAYERS; SILICA; SUPERLATTICES; THICKNESS CONTROL; VACUUM EVAPORATION; X RAY SCATTERING;

BILAYER THICKNESS; GRAZING-INCIDENCE SMALL-ANGLE X-RAY SCATTERING (GISAXS); GUINIER APPROXIMATION;

NANOPARTICLES;

EID: 34147190092     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2006.12.023     Document Type: Article

References (10)

1. Canham L.T. Appl. Phys. Lett. 57 (1990) 1046
2. Tsybeskov L., Hirschman K.D., Duttagupta S.P., Zacharias M., Fauchet P.M., McCafrey J.P., and Lockwood D.J. Appl. Phys. Lett. 72 (1998) 43
3. Green M.A. Prog. Photovoltaics 9 (2001) 257
4. Cho E.-C., Xia J., Aberle A.G., and Green M.A. Sol. Energy Mater. Sol. Cells 74 (2002) 147
5. Cazzanelli M., Navarro-Urrios D., Riboli F., Daldosso N., Pavesi L., Heitmann J., Yi L.X., Scholz R., Zacharias M., and Goesele U. J. Appl. Phys. 96 (2004) 3164
6. Iacona F., Franco G., and Spinella C. J. Appl. Phys. 87 (2000) 1295
7. Bonafos C., Colombeau B., Altibelli A., Carrada M., Ben Assayag G., Garrido B., López M., Pérez-Rodríguez A., Morante J.R., and Claverie A. Nucl. Instr. Meth. B 178 (2001) 17
8. Zacharias M., Heitman J., Scholz R., Kahler U., Schmidt M., and Blaesing J. Appl. Phys. Lett. 80 (2002) 661
9. Amenitsch H., Bernstorff S., and Laggner P. Rev. Sci. Instrum. 66 (1995) 1624
10. Grom G.F., Lockwood D.J., McCaffrey J.P., Labbe H.J., Fauchet P.M., White Jr. B., Diener J., Kovalev D., Koch F., and Tsybeskov L. Nature 407 (2000) 358